| 摘要 |
PROBLEM TO BE SOLVED: To provide a titanium material and a titanium alloy for an ultra-high vacuum vessel, which can reduce the amount of gas emission by adequately controlling a state of an oxide film formed on the surface. SOLUTION: The titanium material used for the material of the ultra-high vacuum vessel comprises pure titanium with an amorphous oxide film formed on the surface exposed to a vacuum atmosphere, and a ratio of titanium atoms forming TiO2 to the total titanium atoms in the oxide film is 40 atom.% or more. Alternatively, the titanium alloy used for the material of the ultra high vacuum vessel comprisesβ-type alloy or anα+β-type alloy with an amorphous oxide film formed on the surface exposed to a vacuum atmosphere, and a ratio of titanium atoms forming TiO2 to the total titanium atoms in the oxide film is 50 atom.% or more.
|
