| 摘要 |
PROBLEM TO BE SOLVED: To manufacture/provide a device having various reliable properties as a mass-produced device, while maintaining advantages of inclined structure. SOLUTION: The electrostatic actuator has an upper structure, which is connected through an arm to a support base provided on a substrate, and is supported in the space above the substrate, and a lower structure which is disposed on the substrate as opposed to the upper structure. Either the upper structure or the lower structure is provided with an inclined structure in order to reduce the distance therebetween, while the other structure is provided with one or more electrodes. The upper structure is so configured that it inclines to the lower structure by applying a voltage between the electrodes and the structure having the inclined structure. An electrode pattern can be formed faithfully to a photomask using an ordinary photolithography technique, since it is formed on the other substrate rather than the substrate having the inclined structure.
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