发明名称 Electrolyte cell for capacitance-voltage (CV) measuring on semiconductor probe
摘要 Light (L) is radiated vertically from top into electrolyte chamber (1) through a window (3). Light outlet aperture (5) in lower part of chamber contains a seal (7). A horizontal semiconductor probe (11) can be pressed from below against the seal. First feed (13) of electrolyte or cleaning liquid. (F) so opens under the light window that gas bubbles are removed from window. A second such feed (17) so opens above the seal that gas bubbles are removed from seal. An outlet (19) for electrolyte or cleaning liquid has its inlet aperture above underside of window. Two electrodes (21,23) end in electrolyte chamber, into which opens a bushing (25) for retaining a reference electrode.
申请公布号 DE20120791(U1) 申请公布日期 2003.05.08
申请号 DE2001220791U 申请日期 2001.12.21
申请人 WOLFF, THOMAS 发明人
分类号 G01N27/22;(IPC1-7):G01R27/26;H01L21/66 主分类号 G01N27/22
代理机构 代理人
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