| 摘要 |
PROBLEM TO BE SOLVED: To detect a photo-thermal signal with uniform sensitivity even when thermal physical values such as light absorption factor and heat conductivity of a sample are not uniform in a light irradiation area, or when the characteristics such as heat conductivity and shielding are structurally different from each other even when the thermal physical values such as light absorption factor and heat conductivity are uniform. SOLUTION: In this method of detecting the photo-thermal displacement image on a sample surface, the reference beam is applied to the surface of the sample, the light reflected from the sample in radiating the reference beam is detected to obtain the information on the structure of the sample surface, an excitation beam for generating the photo-thermal displacement on the sample surfaced by the irradiation, is applied to the neighborhood of the irradiation area of the reference beam on the sample surface, while controlling the distribution of the intensity of light on the basis of the information on the structure of the sample surface obtained by detecting the reflection light of the reference beam, the interference light is formed by allowing the reflection light from the sample in radiating the reference beam and the reflection light from the sample in irradiating the probe light to interfere with each other, the interference light is detected, and the information on the detected interference light is processed on the basis of the information on the structure of the sample surface to detect the photo-thermal displacement image on the sample surface.
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