发明名称 METHOD AND APPARATUS FOR SURFACE TREATMENT
摘要 PROBLEM TO BE SOLVED: To enable the surface treatment for modifying, by using ions, the inside surface of a pit formed in a part (e.g. a bearing of a small-size motor) to be easily, efficiently, and stably conducted. SOLUTION: The inside surface 4b of the pit 4a arranged apart from an ion introduction end is subjected to a surface treatment by introducing ions into the pit 4a while at least a part of the pit 4A is kept blocked up. Ions incident into the pit 4a accumulate on the surface of an insulating material 10. As a result, the electric field becomes large, and since newly incident ions, after reaching the vicinity of the surface of the insulating material 10, are led to the inside surface 4b, the collision ratio of ions to the inside surface 4b becomes high.
申请公布号 JP2003129214(A) 申请公布日期 2003.05.08
申请号 JP20010320034 申请日期 2001.10.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAYATA HIROSHI;YAMAMOTO MASAHIRO;KIMURA TADASHI;HASEGAWA MAKOTO;OTANI HIROKO
分类号 C23C8/36;C23F4/00;(IPC1-7):C23C8/36 主分类号 C23C8/36
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