BURNER FLAME STABILIZER FOR FLAME HYDROLYSIS DEPOSITION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a burner flame stabilizer capable of preventing disturbance due to ambient flow from occurring in the flame and in the grain flow within the flame for improving the grain adhesion rate for realizing a stable and uniform grain adhesion by adding a flow-stabilizing unit to the neighborhood of the coaxial flow diffusion flame. SOLUTION: The flame stabilizer comprises a coaxial flow diffusion flame burner 100 for emitting a flame toward the substrate in a flame hydrolysis deposition process and a flame stabilizer 30 juxtaposed to the burner 100 for isolating the flame from unstable ambient flow. The stabilizer 30 is composed of a ceramic minute tube bundle 32 having a multilayer structure laminated in the peripheral direction.