发明名称 INDUCTION HEATING DEVICES AND METHODS FOR CONTROLLABLY HEATING AN ARTICLE
摘要 A heating device for controllably heating an article defines a processing chamber to hold the article and includes a housing and an EMF generator. The housing includes a susceptor portion surrounding at least a portion of the processing chamber, and a conductor portion interposed between the susceptor portion and the processing chamber. The EMF generator is operable to induce eddy currents within the susceptor portion such that substantially no eddy currents are induced in the conductor portion. The conductor portion is operative to conduct heat from the susceptor portion to the processing chamber. The heating device may further include a platter and an opening defined in the conductor portion, wherein the opening is interposed between the susceptor portion and the platter.
申请公布号 WO03039195(A2) 申请公布日期 2003.05.08
申请号 WO2002US34090 申请日期 2002.10.24
申请人 CREE, INC.;SUMAKERIS, JOSEPH, JOHN;PAISLEY, MICHAEL, JAMES 发明人 SUMAKERIS, JOSEPH, JOHN;PAISLEY, MICHAEL, JAMES
分类号 H05B6/10;C23C16/458;C23C16/46;C30B25/10;H01L21/205;H05B6/02 主分类号 H05B6/10
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