发明名称 CLEANING METHOD AND CLEANING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning apparatus in which such a problem is solved that ground water or city water to be supplied to a first rinsing tank or the like is reacted with a cleaning agent to produce an insoluble component and the insoluble component is accumulated in pipelines and tanks of the cleaning apparatus and contaminates an object to be cleaned. SOLUTION: The reaction of ground water or city water with the cleaning agent and the contamination of the cleaning apparatus and the object to be cleaned are prevented by supplying soft water to at least the first rinsing tank.
申请公布号 JP2003126791(A) 申请公布日期 2003.05.07
申请号 JP20010326924 申请日期 2001.10.24
申请人 SEIKO EPSON CORP 发明人 HOSODA TAKASHI
分类号 B08B3/04;C02F1/42;(IPC1-7):B08B3/04 主分类号 B08B3/04
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