| 摘要 |
A micromachined filter system comprises a micromachined filter (100) integrated in a micro-device (200). In various embodiments, the micromachined filter system is fabricated along with the micro-device (200) using the same or similar techniques. The micromachined filter (100) may comprise a polysilicon filter. According to the micromachined filter system, the micromachined filter (100) may be formed in one or more polysilicon layers of the micro-device. The micromachined filter may also comprise a polyimide filter. In various embodiments, the micromachined filter may be situated downstream of a fluid inlet of the micro-device. In various embodiments, a non-integrated, external pre-filter may be used in conjunction with an integrated micromachined filter. <IMAGE>
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