发明名称 |
Multilayer film structure for soft X-ray optical elements |
摘要 |
In order to provide a multilayer film structure for soft X-ray optical elements in which a high reflectivity can be attained in even a soft X-ray wavelength region of a wavelength of 10 nm or less including the wavelength range of water window zone, in a multilayer film structure for soft X-ray optical elements wherein a first thin film, being a different type of a second thin film, and the second thin film are piled up in layers to form a multi-layer film, at least one of the aforesaid first thin film and the aforesaid second thin film is made to be an oxide thin film. <IMAGE> |
申请公布号 |
EP1091360(A3) |
申请公布日期 |
2003.05.07 |
申请号 |
EP20000127192 |
申请日期 |
1996.01.18 |
申请人 |
RIKAGAKU KENKYUSHO |
发明人 |
KUMAGAI, HIROSHI;TOYODA, KOUICHI |
分类号 |
C23C14/06;C23C14/08;G02B5/08;G21K1/06 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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地址 |
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