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发明名称
METHOD FOR MAKING PYROELECTRIC SENSORS COMPRISING A THIN PYROELECTRIC FILM REQUIRING ELECTRIC POLARISATION
摘要
申请公布号
EP1307929(A1)
申请公布日期
2003.05.07
申请号
EP20010967131
申请日期
2001.07.06
申请人
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
发明人
WILLING, BERT;MURALT, PAUL
分类号
G01J1/02;H01L37/02;(IPC1-7):H01L37/02
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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