发明名称 Bipolar transistor with a base layer having an extremely low resistance and method for fabricating the same
摘要 A base region structure involved in a bipolar transistor, wherein the base region comprises a compound semiconductor epitaxial layer (7) formed in a recessed portion (5) provided by etching in an upper region of a semiconductor substrate (1) and the recessed portion (5) has a depth corresponding to a thickness of the compound semiconductor epitaxial layer (7) so that the base region has a top surface positioned at the same level as a top surface of the semiconductor substrate (1). <IMAGE>
申请公布号 EP0704907(B1) 申请公布日期 2003.05.07
申请号 EP19950115150 申请日期 1995.09.26
申请人 NEC COMPOUND SEMICONDUCTOR DEVICES, LTD. 发明人 KATO, HIROSHI
分类号 H01L29/73;H01L21/203;H01L21/318;H01L21/331;H01L29/165;H01L29/205;H01L29/732;H01L29/737 主分类号 H01L29/73
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