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发明名称
Partially ionized plasma mass filter
摘要
申请公布号
EP1246226(A3)
申请公布日期
2003.05.07
申请号
EP20010204470
申请日期
2001.11.22
申请人
ARCHIMEDES TECHNOLOGY GROUP, INC.
发明人
OHKAWA, TIHIRO;MILLER, ROBERT L.;PUTVINSKI, SERGEI
分类号
B01D57/00;H01J37/05;H01J49/28;H01J49/48;(IPC1-7):H01J49/30;H01J37/32
主分类号
B01D57/00
代理机构
代理人
主权项
地址
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