发明名称 Optical projection lens system
摘要 An optical projection lens system comprising in direction of propagating radiation: a first lens group having positive refractive power, a second lens group having negative refractive power and comprising a waist with a minimum diameter of the propagating radiation, and a further lens arrangement with positive refracting power, which follows the second lens group, wherein at least one lens of the projection lens system, which is arranged in front of the waist comprises an aspherical surface.
申请公布号 US6560031(B1) 申请公布日期 2003.05.06
申请号 US20000694878 申请日期 2000.10.23
申请人 CARL-ZIESS-STIFTUNG 发明人 SHAFER DAVID R.;ULRICH WILHELM
分类号 G02B3/00;G02B9/00;G02B13/14;G02B13/18;G02B13/24;G03F7/20;H01L21/027;(IPC1-7):G02B3/00 主分类号 G02B3/00
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