发明名称 |
Non-hermetic packaging for lithium niobate-based devices |
摘要 |
A lithium niobate-based electro-optic device is formed to include a parylene conformal coating layer, as a sealant against moisture. The use of parylene (preferably, parylene-C) has been found to form an acceptable moisture vapor barrier without the need for additional hermetic packaging of the electro-optic device.
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申请公布号 |
US6560377(B2) |
申请公布日期 |
2003.05.06 |
申请号 |
US20010968124 |
申请日期 |
2001.10.01 |
申请人 |
AGERE SYSTEMS INC. |
发明人 |
JONES CHRISTOPHER D. W.;WILK GLEN DAVID |
分类号 |
G02B6/12;G02F1/035;G02F1/225;(IPC1-7):G02B1/035 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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