| 摘要 |
<p>PURPOSE:To obtain a TFT possessed of necessary characteristics in a device wherein TFTs are laid on a substrate. CONSTITUTION:For instance, in an active matrix type liquid crystal display, a peripheral circuit is formed of crystalline silicon film grown in crystal parallel to the surface of a substrate, and a pixel part is formed of crystalline silicon film grown in crystal vertical to the surface of a substrate. TFTs high in mobility are provided in the peripheral circuit, and TFTs lessened in OFF-state current to be enhanced in charge retention are provided in the pixel art.</p> |
