| 发明名称 |
Solution and method for forming a ferroelectric film |
| 摘要 |
A solution for forming a ferroelectric film characterized in that it contains at least one member selected from the group consisting of modified silicone oil and fluorinated surfactants, and a method for forming a ferroelectric film wherein said solution is used. A uniform film free from uneven coating (striation) is formed.
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| 申请公布号 |
US6558463(B2) |
申请公布日期 |
2003.05.06 |
| 申请号 |
US20000742825 |
申请日期 |
2000.12.20 |
| 申请人 |
NEC CORPORATION;KANTO KAGAKU KABUSHIKI KAISHA |
发明人 |
HASE TAKASHI;MIYASAKA YOICHI;SHINNAI TOSHINOBU;MORIOKA HIROSHI;YAMATE TAKU;KATSURAGI HAYATO;MORI KIYOTO |
| 分类号 |
C01G25/00;C23C18/12;H01B1/22;H01L21/8246;H01L27/10;H01L27/105;(IPC1-7):C09D183/00;C09D201/00 |
主分类号 |
C01G25/00 |
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