发明名称 |
Semiconductor device tester and semiconductor device test method |
摘要 |
A plurality of measuring positions on a sample are sequentially irradiated with electron beams having identical cross sectional shapes, currents produced in the sample when the individual measuring positions are irradiated with electron beams are measured and the measured currents or physical amounts derived from the measured currents are displayed on a two-dimensional plane as a function of measuring position.
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申请公布号 |
US6559662(B1) |
申请公布日期 |
2003.05.06 |
申请号 |
US20000722074 |
申请日期 |
2000.11.27 |
申请人 |
FAB SOLUTIONS, INC. |
发明人 |
YAMADA KEIZO;ITAGAKI YOUSUKE;USHIKI TAKEO;TSUJIDE TOHRU |
分类号 |
G01B15/00;G01N27/00;G01Q30/02;G01Q30/04;G01R1/06;G01R31/302;G01R31/311;H01J37/22;H01J37/28;H01L21/66;(IPC1-7):G01R31/305 |
主分类号 |
G01B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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