METHOD OF MAKING ELECTRONIC MATERIALS,申请号EP20010939925-传众专利搜索

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发明名称	METHOD OF MAKING ELECTRONIC MATERIALS
摘要
申请公布号	EP1305824(A1)	申请公布日期	2003.05.02
申请号	EP20010939925	申请日期	2001.06.06
申请人	EKC TECHNOLOGY, INC.	发明人	MALONEY, DAVID, J.;LEE, WAI, M.;ROMAN, PAUL, J. JR.;FURY, MICHAEL, A.;HILL, ROSS, H.
分类号	G03F7/004;H01L21/033;B05D3/00;B05D5/12;C23C18/14;G03F7/32;G03F7/40;H01L21/00;H01L21/027;H01L21/06;H01L21/266;H01L21/3065;H01L21/308;H01L21/31;H01L21/311;H01L21/314;H01L21/316;H01L21/3205;H01L21/469;H01L21/768;H01L23/52;H01L35/24;(IPC1-7):H01L21/302	主分类号	G03F7/004
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