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发明名称
Heating apparatus
摘要
申请公布号
EP1122982(B1)
申请公布日期
2003.05.02
申请号
EP20010300946
申请日期
2001.02.02
申请人
NGK INSULATORS, LTD.
发明人
YAMAGUCHI, SHINJI;YAMADA, ATSUO
分类号
H05B3/18;H05B3/20;H01L21/00;H05B1/02;H05B3/00;H05B3/02;H05B3/14;H05B3/28;(IPC1-7):H05B3/00;G05D23/24;H05B3/26
主分类号
H05B3/18
代理机构
代理人
主权项
地址
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