发明名称 |
Optical waveguide probe and manufacturing method of the same, and scanning near field optical microscope |
摘要 |
<p>An optical waveguide probe is disclosed which is used for a scanning near-field optical microscope, has a low light propagation loss, and is capable of performing an AFM operation, and a manufacturing method thereof is disclosed. The vicinity of the tip of an optical waveguide 2 is bent toward a side of a probe portion 9 through a plurality of surfaces symmetrical with respect to a plane including an optical axis of the optical waveguide 2. By this, a loss of a propagated light 7 at a bent portion 10 is reduced, and the propagated light 7 can be condensed to a minute aperture 5, so that near-field light can be efficiently emitted from the minute aperture 5. &lt;IMAGE&gt; &lt;IMAGE&gt; &lt;IMAGE&gt; &lt;IMAGE&gt;</p> |
申请公布号 |
EP1148371(A3) |
申请公布日期 |
2003.05.02 |
申请号 |
EP20010303515 |
申请日期 |
2001.04.17 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
MITSUOKA, YASUYUKI;NIWA, TAKASHI;KATO, KENJI;OUMI, MANABU;KASAMA, NOBUYUKI;ICHIHARA, SUSUMU |
分类号 |
G02B6/12;G01Q60/18;G01Q70/10;G01Q70/16;G02B6/13;G02B6/24;G02B21/00;G02B21/06;(IPC1-7):G02B21/00;G12B21/02;G12B21/06 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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