发明名称 |
METHOD FOR FABRICATING AN ISOLATED MICROELECTROMECHANICAL SYSTEM DEVICE |
摘要 |
A method is presented for fabricating an electrically isolated MEMS device having a conductive outer MEMS element, and an inner movable MEMS element spaced apart from the conductive outer MEMS element. The inner element includes a nonconductive base having a plurality of conductive structures extending therefrom. The conductive components are formed by plating a conductive material into a pre-formed mold which defines the shape of the conductor.
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申请公布号 |
US2003082928(A1) |
申请公布日期 |
2003.05.01 |
申请号 |
US20010002725 |
申请日期 |
2001.10.25 |
申请人 |
KNIESER MICHAEL J.;KRETSCHMANN ROBERT J.;LUCAK MARK A.;HARRIS RICHARD D. |
发明人 |
KNIESER MICHAEL J.;KRETSCHMANN ROBERT J.;LUCAK MARK A.;HARRIS RICHARD D. |
分类号 |
B81B7/00;B81C1/00;(IPC1-7):H01L21/00;C23F1/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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