| 摘要 |
<p>A microwave plasma processing device, comprising a processing container (12), a microwave generator (24), a wave guide tube (22) for guiding microwave from the microwave generator (24), and a microwave radiating member (19) for radiating the microwave having a wave length shortened by a wave-slowing plate (18) into a space inside the processing container, the wave guide tube (22) further comprising a single microwave output opening (22a) located at the position thereof corresponding to the center portion of the microwave radiating member (19).</p> |
