| 摘要 |
PURPOSE: An apparatus for analyzing semiconductor sample is provided to effectively discharge electric charges accumulated in a semiconductor sample by installing a conductive contact part. CONSTITUTION: A semiconductor sample(110) is loaded on a sample support pedestal(100). A ground wire(140) is connected to the lower portion of the sample support pedestal(100). A connection part(130) is located on the edge portion of the sample support pedestal(100) for electrically connecting the sample support pedestal(100) with a conductive contact part(120), wherein the conductive contact part(120) is capable of contacting an analysis region of the semiconductor sample(110). Preferably, the connection part(130) is provided with a conductive connection portion and a position shift part(150) for controlling the position of the conductive contact part(120). Preferably, the conductive contact part(120) is one selected from group consisting of Au, Pt, and Ag.
|
