发明名称 Method for forming thin film and method for forming electronic device
摘要 The invention provides thin films of low molecular compounds. A thin-film forming area on a surface of a silicon substrate is allowed to have high affinity for a thin-film forming material. For this purpose, a self-assembled film having an atomic group in common with a molecule constituting the thin-film forming material is formed in the thin-film forming area. Thereafter, a solution is discharged to the surface of the silicon substrate by an ink jet process.
申请公布号 US2003082858(A1) 申请公布日期 2003.05.01
申请号 US20020267638 申请日期 2002.10.10
申请人 SEIKO EPSON CORPORATION 发明人 MORII KATSUYUKI;TAKIGUCHI HIROSHI
分类号 H05B33/10;B05D1/18;B05D7/00;C08G61/10;C08G61/12;H01L21/00;H01L21/208;H01L51/00;H01L51/05;H01L51/30;H01L51/40;H01L51/50;(IPC1-7):H01L21/00;H01L21/84 主分类号 H05B33/10
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