发明名称 |
Method for forming thin film and method for forming electronic device |
摘要 |
The invention provides thin films of low molecular compounds. A thin-film forming area on a surface of a silicon substrate is allowed to have high affinity for a thin-film forming material. For this purpose, a self-assembled film having an atomic group in common with a molecule constituting the thin-film forming material is formed in the thin-film forming area. Thereafter, a solution is discharged to the surface of the silicon substrate by an ink jet process.
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申请公布号 |
US2003082858(A1) |
申请公布日期 |
2003.05.01 |
申请号 |
US20020267638 |
申请日期 |
2002.10.10 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MORII KATSUYUKI;TAKIGUCHI HIROSHI |
分类号 |
H05B33/10;B05D1/18;B05D7/00;C08G61/10;C08G61/12;H01L21/00;H01L21/208;H01L51/00;H01L51/05;H01L51/30;H01L51/40;H01L51/50;(IPC1-7):H01L21/00;H01L21/84 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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