发明名称 TUNABLE CANTILEVER APPARATUS AND METHOD FOR MAKING SAME
摘要 Mass distribution within programmable surface control devices is controlled by the presence or absence of an electrodeposition of metal and/or metal ions from a solid solution upon application of a suitable electric field. One such programmable surface control device includes a tunable cantilever assembly whose resonant frequency is changed by depositing and dissolving an electrodeposit on a surface of the assembly using an electric field.
申请公布号 WO03036736(A2) 申请公布日期 2003.05.01
申请号 WO2002US34558 申请日期 2002.10.28
申请人 AXON TECHNOLOGIES CORP.;KOZICKI, MICHAEL, N. 发明人 KOZICKI, MICHAEL, N.
分类号 H01L27/24;H01L45/00;H03H3/007;H03H9/24 主分类号 H01L27/24
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