Manufacturing method for triode field emission display

摘要

The present invention provides a method for manufacturing a triode field emission display (FED) that can accommodate a large screen size and that has holes that are minutely and uniformly formed. The method includes forming cathode electrodes on a first substrate; depositing a photosensitive material on the first substrate covering the cathode electrodes; patterning the photosensitive material in a predetermined pattern to form guide supports for the formation of insulation layer holes at locations where an electron emitting layer will be formed on the cathode electrodes; forming a preliminary insulation layer on the first substrate covering the guide supports; removing the guide supports from the cathode electrodes to form holes at the locations of the guide supports, thereby realizing a completed insulation layer from the preliminary insulation layer; forming gate electrodes on the insulation layer, the gate electrodes having holes corresponding to the holes of the insulation layer; forming an electron emitting layer on the cathode electrodes; providing a second substrate with anode electrodes and a phosphor layer formed thereon, substantially in parallel to the first substrate, and connecting and sealing the first and second substrates to realize a sealed assembly; and exhausting air from within the sealed assembly.