Microdevice with lever assembly

摘要

A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.