LIQUID CRYSTAL PROCESS DEFECT INSPECTION APPARATUS AND INSPECTION METHOD

摘要

The glass substrate test apparatus of the liquid crystal cell process comprises a laser unit for generating a laser beam, a beam slitter and parallel beam slitter for slitting the laser beam emitted from the laser unit so as to have an elongated cross section and parallelizing the slit laser beam, a photo detector for detecting an intensity of double refraction of the slit laser beam transmitted over the whole glass substrate, a phase detector for measuring the laser double refraction detected by the photo detector and comparing the measured double refraction with a standard laser double refraction, and a polarizer arranged between the laser unit and the beam slitter or between the beam slitter and the parallel beam slitter for polarizing the laser beam to a parallel ray.