| 摘要 |
<p>In an ink jet printhead, the ink feeding duct (2), passing through the thickness of the silicon substrate, and in hydraulic communication with the ejection cells (8) through an outlet area (2a) on the front surface (5) of the substrate (3), is built in three successive stages of erosion of the substrate (3), the first of which is performed on the rear surface (6) of the substrate, to produce a first cavity (24) having a depth (P1), and a further cavity (26) communicating and having a depth (P2), extending in the direction of the front surface (5), and presenting a back wall (28) separated from the front surface (5) by a diaphragm (30); the second stage is performed on the opposite front surface (5) to cut a channel (40) in the direction of the diaphragm (30), of depth (P4) and defining the contour of the outlet area (2a) on the front surface (5), and the third stage is performed from said rear surface (6) as a continuation of the erosion performed in the first stage, to remove the diaphragm (30) and open the duct (2) between the rear (6) and front (5) surfaces.</p> |
