MICROSCOPE APPARATUS TO INSPECT WAFER

摘要

PURPOSE: A microscope apparatus to inspect a wafer is provided to examine a wafer in various angles and positions by installing an angle and height adjusting part at a reflector. CONSTITUTION: An optical system having an objective lens(120) and an ocular eyepiece is installed at a body(100) of a microscope for examining a wafer(W). A sample pedestal(150) is located under the optical system for loading the wafer(W). A reflector(140) is installed under the lower portion of the objective lens(120) for reflecting a predetermined portion of the wafer(W) to the objective lens(120). An angle adjusting part is installed at one side of the reflector(140) for adjusting the reflection angle of the reflector(140). A height adjusting part is installed at the other side of the reflector(140) for adjusting the height of the reflector(140). Preferably, the angle adjusting part is provided with a frame(200) having two brackets and an angle adjusting lever. Preferably, the height adjusting part is provided with a guide(270), a rack(240) connected with the guide(270), a pinion(230) and a height adjusting lever for revolving the pinion(230).