发明名称 Carrier device
摘要 To devise a carrier device in which no air can accumulate between the flexible board and the carrier surface when the flexible board is held securely by vacuum suction by the carrier surface, the carrier surface of the carrier device on which the flexible board is placed is provided with an opening for supplying a vacuum and with several grooves which extend radially from the opening, the grooves being connected to one another only at the opening.
申请公布号 US2003080287(A1) 申请公布日期 2003.05.01
申请号 US20010983611 申请日期 2001.10.25
申请人 KAWAHASHI TAKASHI 发明人 KAWAHASHI TAKASHI
分类号 G03F7/20;H01J5/02;(IPC1-7):H01J5/02 主分类号 G03F7/20
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