| 摘要 |
PURPOSE: A limit sensor assembly for a tray transport apparatus of a semiconductor device test handler is provide to sense a holder assembly to move excessively by an error of a driving unit of the tray transport apparatus, and also to perform home checking work easily. CONSTITUTION: A base plate(101) is installed horizontally on a chamber backside constituting a test site of a handler. An installation plate(101a) is installed vertically on an end of the base plate, and forms a chamber side wall. A guide rail(102) is installed horizontally along a lengthy direction of the base plate. A movement block(105) is installed to move along the guide rail. A holder(120) is fixed to the movement block and transports an edge part of a test tray by holding it. A driving unit moves the movement block and the holder. And a spline(110) combines and releases the holder as to the side edge part of the test tray by being combined to the holder. |
