发明名称 Thermopile on an electrical indulating substrate
摘要 Method for manufacturing a thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts which consist only of the first conductive material. The second material is better electrically conducting than the first and, connected as thermocouple, can thereby generate a certain thermo-voltage. The second material is applied to the first, starting from a layer of the first material on the substrate, by etching stripes therein via the so-called "blind-hole etching" technique and applying the second material in these stripes.
申请公布号 US2003082843(A1) 申请公布日期 2003.05.01
申请号 US20020315082 申请日期 2002.12.10
申请人 BERKIN B.V. 发明人 BOER HENDRIK JAN;VAN DER GRAAF FREDERIK;MARTINUS BOUDEWIJN
分类号 G01F1/692;G01K7/02;H01L35/34;(IPC1-7):H01L21/00;H01L35/28 主分类号 G01F1/692
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