SUBSTRATE WITH TRANSPARENT CONDUCTIVE OXIDE FILM AND PRODUCTION METHOD THEREFOR, AND PHOTOELECTRIC CONVERSION ELEMENT

摘要

A substrate with a transparent conductive oxide film(especially,a substrate with a transparent conductive oxide film useful as a thin−film silicon−based solar cell−use substrate)being excellent in mass−production efficiency,and being characterized by having a low resistance and a high transparency and having a good light scattering performance in a full wavelength region(300 nm−3μm)of solar ray,and a production method therefor;and a photoelectric conversion element(especially,solar cell)using the substrate.A substrate with a transparent conductive oxide film,comprising a transparent conductive oxide film provided on the substrate and constituted of a plurality of ridges and a plurality of float portions,the surfaces of the ridges and the flat portions having many continuous,micron−size protrusions.