发明名称 Oscillation method and device of fluorine molecular laser
摘要 An oscillation method and a device of fluorine molecular laser with narrow spectral line width are provided. For this purpose, the device includes main electrodes (14, 15) for performing main discharge (50) in substantially a same direction as an optical axis of laser light (11) to be oscillated to excite a laser gas containing fluorine, an insulator (12) which is held between the main electrodes and into which the laser gas containing fluorine is injected, and resonators (16, 18) which are placed with the insulator between them, and a space (M (lambd)) of a vertical mode expressed in wavelength is made larger than full width at half maximum (DELTA lambd) of a gain curve (R) of the laser gas.
申请公布号 US2003081643(A1) 申请公布日期 2003.05.01
申请号 US20020281985 申请日期 2002.10.29
申请人 TAKEHISA KIWAMU;GOTO TATSUMI 发明人 TAKEHISA KIWAMU;GOTO TATSUMI
分类号 G03F7/20;H01L21/027;H01S3/03;H01S3/038;H01S3/05;H01S3/097;H01S3/225;(IPC1-7):H01S3/22 主分类号 G03F7/20
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