发明名称 |
End-effectors for handling microelectronic workpieces |
摘要 |
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.
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申请公布号 |
US2003082042(A1) |
申请公布日期 |
2003.05.01 |
申请号 |
US20020195137 |
申请日期 |
2002.07.11 |
申请人 |
WOODRUFF DANIEL J.;OBERLITNER THOMAS H.;HARRIS RANDY A.;ERICKSON JAMES J.;CARR DOUGLAS W. |
发明人 |
WOODRUFF DANIEL J.;OBERLITNER THOMAS H.;HARRIS RANDY A.;ERICKSON JAMES J.;CARR DOUGLAS W. |
分类号 |
H01L21/00;H01L21/687;(IPC1-7):B66C23/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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