METHOD FOR MANUFACTURING TRIODE TUBE TYPE FIELD EMISSION DISPLAY DEVICE

摘要

PURPOSE: A method for manufacturing a triode tube type field emission display device is provided to obtain uniform holes with a large aspect ratio even without performing a complicated etching process. CONSTITUTION: A method comprises the first step of forming a cathode electrode(4) on the first substrate(2); the second step of depositing a photosensitive material all over the cathode electrode on the first substrate; the third step of forming a guide column(7) on the cathode electrode at the position where an electron emitting layer is to be formed, by patterning the photosensitive material into a predetermined pattern; the fourth step of forming a preliminary insulating layer covering the guide column; the fifth step of exposing the top of the guide column by removing the top of the preliminary insulating layer; the sixth step of forming an insulating layer with a hole formed on the portion where the guide column has been located, by removing the guide column from the cathode electrode; the seventh step of forming a gate electrode having a hole corresponding to the hole of the insulating layer; the eighth step of forming an electron emitting layer on the cathode electrode; the ninth step of disposing the second substrate where an anode electrode and a phosphor layer are formed, to be substantially parallel to the first substrate, and forming a closed container by coupling the first substrate and the second substrate; and the tenth step of degassing the closed container.