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发明名称
Regelungsverfahren beim Ätzen mit Fluorwasserstoff
摘要
申请公布号
DE19850078(C2)
申请公布日期
2003.04.30
申请号
DE19981050078
申请日期
1998.10.30
申请人
ROBERT BOSCH GMBH
发明人
BECKER, VOLKER;LAERMER, FRANZ;SCHILP, ANDREA
分类号
H01L21/311;(IPC1-7):C23F1/00;C23F1/12;H01L21/306
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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