发明名称 Process for coating molds used for melting highly pure silicon for photovoltaic purposes in the production of wafers, comprises inserting silane with ammonia into the inner side of an externally heated crucible
摘要 Process for coating molds comprises inserting silane with ammonia into the inner side of an externally heated crucible. The crucible is heated to above 500 deg C. An Independent claim is also included for a device for carrying out the process.
申请公布号 DE10150680(A1) 申请公布日期 2003.04.30
申请号 DE20011050680 申请日期 2001.10.17
申请人 SCANWAFER GMBH 发明人
分类号 C23C12/00;C23C12/02;C23C16/04;C23C16/34;C23C28/04;(IPC1-7):C01B33/02;H01L31/18 主分类号 C23C12/00
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