发明名称 Piezoelektrisches Element des Dünnschichttyps
摘要 <p>A piezoelectric film-type element comprises a piezoelectric operating layer constructed by successively and integrally forming and stacking, on a ceramic substrate (12), a single flat film-shaped lower electrode (16), a piezoelectric layer (18), and an upper electrode (20) comprising a plurality of alternately arranged strip electrodes (20a, 20b). The lower electrode (16) is designated as a first electrode, and the upper electrode (20) is designated as a second electrode. A first piezoelectric operating means is constructed by the first and second electrodes and the piezoelectric layer (18), while a second piezoelectric operating means is constructed by the second electrode and the piezoelectric layer (18). No other piezoelectric layer is stacked on the foregoing piezoelectric operating layer. Operating characteristics of the piezoelectric operating section can be sufficiently utilized by constructing the piezoelectric film-type element as described above. Thus it is possible to provide the piezoelectric film-type element which has excellent function, and which is allowed to have a compact size and to be operated at a low voltage. <IMAGE></p>
申请公布号 DE69714909(T2) 申请公布日期 2003.04.30
申请号 DE1997614909T 申请日期 1997.05.23
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI, YUKIHISA;KIMURA, KOJI;TAKAHASHI, MASAO
分类号 H01L41/09;(IPC1-7):H01L41/09 主分类号 H01L41/09
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