发明名称 |
Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted |
摘要 |
An exposure/imaging apparatus and method effects projection exposure while moving a first object and a second object in a predetermined moving direction, effecting projection exposure of an image of the first object onto the second object. An adjusting member is used to adjust imaging characteristics of a projection optical system that is used to perform the projection exposure.
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申请公布号 |
US6556278(B1) |
申请公布日期 |
2003.04.29 |
申请号 |
US20000722516 |
申请日期 |
2000.11.28 |
申请人 |
NIKON CORPORATION |
发明人 |
TANAKA MASASHI;KUMAZAWA MASATO;KATO KINYA;KATO MASAKI;CHIBA HIROSHI;SHIRASU HIROSHI |
分类号 |
G02B13/22;G02B17/00;G02B17/06;G02B17/08;G02B27/10;G03F7/20;(IPC1-7):G03B27/54;G03B27/42;G03B27/70;G03B27/32 |
主分类号 |
G02B13/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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