发明名称 Semiconductor device for providing a noise shield
摘要 A first guard ring formed by high concentration ion diffusion is established around the transistor formation region of the semiconductor substrate. A second guard ring is established around the first guard ring with a prescribed gap therebetween. A metal film is formed opposing to each guard ring with an insulating film interposed therebetween; these metal films are connected to the opposing guard rings by interlayer wires. The metal films are each connected to external terminals providing a standard potential by individual metal wires from their respective electrodes.
申请公布号 US6555884(B1) 申请公布日期 2003.04.29
申请号 US20000717308 申请日期 2000.11.22
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 MURAKAMI TADAMASA
分类号 H01L21/3205;H01L21/822;H01L23/52;H01L23/552;H01L23/58;H01L27/04;H01L29/06;(IPC1-7):H01L29/74;H01L31/119 主分类号 H01L21/3205
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