发明名称 PRE-IONIZER FOR A LASER
摘要 An anode (14) and a cathode (16) in a laser (10) are spaced in a first direction. A voltage difference be- tween these members produces an electrical discharge which ionizes gases (18) in the laser (10) to react chemi- cally and produce coherent radiation. First and second tubes (22) made from a dielectric material are spaced in the laser (10) in a second direction transverse (preferably perpendicular) to the first direction. The anode (14), the cathode (16) and the tubes (22) extend through the laser (10) in a direction transverse (preferably perpendicular) to the first and second directions. The tubes (22) are preferably at least a 99.9 % pure polycrystalline alumi- num oxide ceramic with traces of other metallic elements than aluminum. Bushings (24) made from a material homogenous (preferably identical) to the tube material are integral with the tube (22) near the opposite tube ends. First electrical conductors (30) extend through the tubes (22). Second electrical conductors (32) (preferably resilient) contact (preferably line contact) the external tube surfaces to define capacitors with the first conduc- tors (30) and the tube material. Positioning members (36) movably engage the tube external surfaces near the tube ends in co-operation with the resilient members es- tablishing three (3) - line contacts with the tubes (22) for positioning the tubes (22) precisely in the cavity (1). When a voltage pulse is applied between the first conductor (30) inside each tube (22) and the conductors (32) on such tube (22), the resultant cor- ona discharge from the external tube surface produces ultraviolet light whic h pre-ionizes the gases (18) in the cavity (12). This fa- cilitates the ionization of the gases (18) in the cavity (12) when an anode (14)-cathode (16) electrical discharge is produced.
申请公布号 CA2146641(C) 申请公布日期 2003.04.29
申请号 CA19932146641 申请日期 1993.10.05
申请人 CYMER LASER TECHNOLOGIES 发明人 LARSON, DONALD G.
分类号 H01S3/038;H01S3/0977;(IPC1-7):H01S3/038 主分类号 H01S3/038
代理机构 代理人
主权项
地址