| 摘要 |
A ferroelectric capacitor with a multilayer ferroelectric film to prevent degradation of its ferromagnetic characteristics, wherein the ferroelectric film is made of a lower layer of PZT or PLZT formed on a lower electrode and an upper, titanium rich, layer of PZT, PLZT, or PbTiO3, an upper electrode formed on the upper layer of the ferroelectric film and a protective layer formed to cover the ferroelectric capacitor.
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