发明名称 Polymer remover
摘要 Compositions for the removal of polymeric material from a substrate are provided where the compositions include a polyol compound selected from (C3-C20)alkanediols, substituted (C3-C20)alkanediols, (C3-C20)alkanetriols or substituted (C3-C20)alkanetriols, a glyco ether, at least 5% wt water based on the total weight of the composition, and a fluoride salt selected from ammonium fluoride, ammonium bifluoride, ammonium-tetramethylammonium bifluoride or mixtures thereof. Methods of removing polymeric material using these compositions are also provided.
申请公布号 US6554912(B2) 申请公布日期 2003.04.29
申请号 US20010921052 申请日期 2001.08.02
申请人 SHIPLEY COMPANY, L.L.C. 发明人 SAHBARI JAVAD J.
分类号 C09D9/00;C11D7/10;C11D7/26;C11D7/28;C11D7/32;C11D7/34;C11D7/50;C11D7/60;C11D17/08;G03F7/42;H01L21/02;H01L21/302;H01L21/304;H01L21/311;H01L21/3213;(IPC1-7):B08B3/04 主分类号 C09D9/00
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