发明名称 |
Method and apparatus for inspecting bumps and determining height from a regular reflection region |
摘要 |
A method of inspecting bumps provided on a surface of an object to be inspected includes the steps of: (a) irradiating a first irradiation beam on said object in an oblique direction and (b) imaging a first reflected beam from said object so as to obtain a first reflection image including a first reflection region and a height data of said bump corresponding to said first regular reflection region produced by a part of the first reflected beam reflected near an apex of the bump. The method further includes the steps of (c) shifting a position of said first regular reflection region in said first reflection image in accordance with a value derived from said height data and said predetermined angle, (d) extracting said first regular reflection region within a predetermined region from said first reflection image after said step c), and (e) detecting a height of said bump based on said height data corresponding to the extracted first regular reflection region. Also disclosed is an apparatus for performing the disclosed method.
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申请公布号 |
US6555836(B1) |
申请公布日期 |
2003.04.29 |
申请号 |
US20000533235 |
申请日期 |
2000.03.22 |
申请人 |
FUJITSU LIMITED |
发明人 |
TAKAHASHI FUMIYUKI;TSUKAHARA HIROYUKI;OSHIMA YOSHITAKA;NISHIYAMA YOUJI;FUSE TAKASHI |
分类号 |
G01B11/24;G01N21/956;H01L21/60;(IPC1-7):G01N21/86 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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