Nozzle plate and a manufacturing process thereof

摘要

A nozzle plate is provided with nozzle orifices 2 through which ink is to be ejected, the nozzle orifices 2 being formed by an excimer laser. A manufacturing process for manufacturing the nozzle plate in which the nozzle orifices 2 are formed by the excimer laser uses a working lens having a numerical aperture (NA) set to 0.13 or more and 0.35 or less.