发明名称 Apparatus for and method of reducing or eliminating interference effects in a light tunnel illuminator
摘要 A light tunnel (24) comprising a hollow light tunnel body (30) or a solid light tunnel body (80) having a central axis (A1 or A2), a reflective surface (42 or 84) facing the axis, and an output end (54 or 94) having an edge (60 or 106) with a chamfered surface (120 or 130) formed on the edge. The chamfered surface is designed to alter the reflective properties of the reflective surfaces of the light tunnel body near the output end so as to reduce or eliminate edge ringing from the light tunnel body edge. In the case of a knife-edge (340) placed at the output end of the light tunnel body, knife-edge ringing is eliminated by providing a light source (310) in the form of a laser with a large number of spatial modes (M2>30). The present invention is expected to be most useful in cases where time-averaging or other interference-eliminating means prove impossible or impractical, such as with applications requiring only one or a few high-irradiance light pulses that need to uniformly irradiate a workpiece.
申请公布号 US6554464(B1) 申请公布日期 2003.04.29
申请号 US20000505268 申请日期 2000.02.16
申请人 ULTRATECH STEPPER, INC. 发明人 HAWRYLUK ANDREW M.;FONG YU CHUE;STITES DAVID G.;WANG WEIJIAN
分类号 G02B27/09;(IPC1-7):F21V8/00 主分类号 G02B27/09
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