发明名称 |
High precision flexure stage |
摘要 |
Disclosed is a positioning stage for precisely positioning an object within a limited range of travel (e.g. 100 mum). By way of example, the stage can be used to position an electron source such as a field emitter in an electron beam microcolumn. The stage includes a block which defines a channel to allow flexure along a first axis. The block also defines another channel to allow flexure along a second axis perpendicular to the first axis. Using actuators in the channels to flex a portion of the block, the object supported by the block can be precisely positioned to a desired location in a horizontal plane defined by the first and second axes.
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申请公布号 |
US6555829(B1) |
申请公布日期 |
2003.04.29 |
申请号 |
US20000481103 |
申请日期 |
2000.01.10 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SPALLAS JAMES P.;MURAY LAWRENCE P.;TROST DAVID;KIM HO-SEOB;CHANG TAI-HON P. |
分类号 |
B23Q1/34;B23Q1/62;H01J37/02;H01L21/68;(IPC1-7):G01B9/02 |
主分类号 |
B23Q1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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